ReactiveSputtering相关论文
Study on Structures and Properties of Gadolinium Oxide: Effects of Oxygen Flows and Annealing Temper
Among the rare earth oxide, Gadolinium Oxide (Gd2O3) has attractive feature for optical and electronic applications. It ......
The target sputtering modes influence the deposition process and films structure in reactive high power pulse magnetron ......
Synthesis of Titanium Oxide Thin Films Containing Antibacterial Silver Nanoparticles by Reactive Mag
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Global plasma models for non-reactive and reactive depositions by modulated pulsed power magnetron s
A global plasma model has been developed to describe the MPPMS discharge process based on the particle balance and the e......
Ti-W-N thin films were deposited by reactive RF sputtering with a W-Ti(30 at.%) target in an argon/nitrogen atmosphere.T......
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Molecular Simulations and Thermodynamic Modeling of Cluster Ejection by Cluster Impact on Carbon-Bas
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论述了一种高分辨率，高清晰度，快速打印的薄膜热印头的结构，设计和制造技术，主要研究了Ｔａ２Ｎ，ＳｉＯ２和Ｔａ２Ｏ５薄膜的性能对薄膜热印头的影响。......
